New materials keep semiconductor industry on path predicted by Moore's law.
1. Lithography at the EDGE of light. Uncertainty around new exposure tools based on
EXTREME ULYRAVIOLET technology forces suppliers to pursue multiple research themes.
2. Chip polishing shines bright. Suppliers of CHEMICAL MECHANICAL PLANARIZATION
materials say they are still playing a role in the evolution of chip making.
3.Fat opportunity in thin films. Semiconductor industry seeks NEW PRECURSORS to deposit
atom-thick critical materials. Intel and Taiwan Semiconductor are getting ready to commercialize
chips with 10-nm features.
From : CEN JULY 6 , 2015. P. 31-37
By : Alexander H. Tullo & Michael McCoy, C&EN New York City;
Jean-Francois Tremblay , C &EN Hong Kong
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